Self-forces in 3D finite element Monte Carlo simulations of a 10.7 nm gate length SOI FinFET

  1. Aldegunde, M.
  2. Kalna, K.
Actas:
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD

ISBN: 9781479952885

Ano de publicación: 2014

Páxinas: 185-188

Tipo: Achega congreso

DOI: 10.1109/SISPAD.2014.6931594 GOOGLE SCHOLAR
Fonte de datos: Scopus