Self-forces in 3D finite element Monte Carlo simulations of a 10.7 nm gate length SOI FinFET

  1. Aldegunde, M.
  2. Kalna, K.
Proceedings:
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD

ISBN: 9781479952885

Year of publication: 2014

Pages: 185-188

Type: Conference paper

DOI: 10.1109/SISPAD.2014.6931594 GOOGLE SCHOLAR
Data source: Scopus