Metal Grain Granularity Study on a Gate-All-Around Nanowire FET
- Nagy, D.
- Indalecio, G.
- García-Loureiro, A.J.
- Elmessary, M.A.
- Kalna, K.
- Seoane, N.
ISSN: 0018-9383
Year of publication: 2017
Volume: 64
Issue: 12
Pages: 5263-5269
Type: Article
ISSN: 0018-9383
Year of publication: 2017
Volume: 64
Issue: 12
Pages: 5263-5269
Type: Article