Metal Grain Granularity Study on a Gate-All-Around Nanowire FET

  1. Nagy, D.
  2. Indalecio, G.
  3. García-Loureiro, A.J.
  4. Elmessary, M.A.
  5. Kalna, K.
  6. Seoane, N.
Journal:
IEEE Transactions on Electron Devices

ISSN: 0018-9383

Year of publication: 2017

Volume: 64

Issue: 12

Pages: 5263-5269

Type: Article

DOI: 10.1109/TED.2017.2764544 GOOGLE SCHOLAR