Accurate interferometric system to perform the substrate focusing and alignment in laser writing processes

  1. Salgueiro, J.R.
  2. Román, J.F.
  3. Moreno, V.
Journal:
Journal of Modern Optics

ISSN: 1362-3044,  0950-0340

Year of publication: 1997

Volume: 44

Issue: 6

Pages: 1065-1072

Type: Article

DOI: 10.1080/09500349708230719 GOOGLE SCHOLAR
Data source: Scopus