Multi-Subband Interface Roughness Scattering using 3D Finite Element Monte Carlo with 2D Schodinger Equation for Simulations of sub-16nm FinFETs
- Nagy, Daniel
- Elmessary, Muhammad A.
- Aldegunde, Manuel
- Lindberg, Jari
- Garcia-Loureiro, Antonio J.
- Kalna, Karol
ISSN: 1946-1569
ISBN: 978-1-4673-7860-4
Ano de publicación: 2015
Páxinas: 377-380
Congreso: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
Tipo: Achega congreso