Pelgrom-Based Predictive Model to Estimate Metal Grain Granularity and Line Edge Roughness in Advanced Multigate MOSFETs

  1. Fernandez, J.G.
  2. Seoane, N.
  3. Comesana, E.
  4. Garcia-Loureiro, A.
Journal:
IEEE Journal of the Electron Devices Society

ISSN: 2168-6734

Year of publication: 2022

Volume: 10

Pages: 953-959

Type: Article

DOI: 10.1109/JEDS.2022.3214928 GOOGLE SCHOLAR lock_openOpen access editor
Data source: Scopus