Laser Micromachining and Characterization of Metal-on-Glass High Density Pitch Adapters

  1. Pérez, E.
  2. Rey-García, F.
  3. Bao-Varela, C.
  4. De La Fuente, G.F.
  5. Dosil, A.
  6. Gallas, A.A.
  7. Rodríguez, P.
Journal:
Journal of Microelectromechanical Systems

ISSN: 1057-7157

Year of publication: 2015

Volume: 24

Issue: 5

Pages: 1479-1486

Type: Article

DOI: 10.1109/JMEMS.2015.2413051 GOOGLE SCHOLAR
Data source: Scopus