Multi-subband interface roughness scattering using 3D Finite Element Monte Carlo with 2D Schödinger equation for simulations of sub-16nm FinFETs
- Nagy, D.
- Elmessary, M.A.
- Aldegunde, M.
- Lindberg, J.
- Garcia-Loureiro, A.J.
- Kalna, K.
Actas:
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD
ISBN: 9781467378581
Ano de publicación: 2015
Volume: 2015-October
Páxinas: 377-380
Tipo: Achega congreso