Multi-subband interface roughness scattering using 3D Finite Element Monte Carlo with 2D Schödinger equation for simulations of sub-16nm FinFETs

  1. Nagy, D.
  2. Elmessary, M.A.
  3. Aldegunde, M.
  4. Lindberg, J.
  5. Garcia-Loureiro, A.J.
  6. Kalna, K.
Proceedings:
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD

ISBN: 9781467378581

Year of publication: 2015

Volume: 2015-October

Pages: 377-380

Type: Conference paper

DOI: 10.1109/SISPAD.2015.7292338 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus