MC/DD study of metal grain induced current variability in a nanoscale InGaAs FinFET

  1. Seoane, N.
  2. Aldegunde, M.
  3. Kalna, K.
  4. Garcia-Loureiro, A.J.
Proceedings:
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD

ISBN: 9781479952885

Year of publication: 2014

Pages: 253-256

Type: Conference paper

DOI: 10.1109/SISPAD.2014.6931611 GOOGLE SCHOLAR