Model of linewidth for laser writing on a photoresist

  1. Salgueiro, J.R.
  2. Moreno, V.
  3. Liñares, J.
Journal:
Applied Optics

ISSN: 2155-3165,  1559-128X

Year of publication: 2002

Volume: 41

Issue: 5

Pages: 895-901

Type: Article

DOI: 10.1364/AO.41.000895 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus