Interferometric monitoring of surface shaping processes in microlenses produced by melting photoresist

  1. Mancebo, T.
  2. Bara, S.
Journal:
Journal of Modern Optics

ISSN: 1362-3044,  0950-0340

Year of publication: 1998

Volume: 45

Issue: 5

Pages: 1029-1037

Type: Article

DOI: 10.1080/09500349808230895 GOOGLE SCHOLAR
Data source: Scopus