An accurate machine learning model to study the impact of realistic metal grain granularity on Nanosheet FETs

  1. Fernandez, J.G.
  2. Seoane, N.
  3. Comesaña, E.
  4. Pichel, J.C.
  5. Garcia-Loureiro, A.
Journal:
Solid-State Electronics

ISSN: 0038-1101

Year of publication: 2023

Volume: 207

Type: Article

DOI: 10.1016/J.SSE.2023.108710 GOOGLE SCHOLAR lock_openOpen access editor
Data source: Scopus