Impact of the aggressive scaling on the performance of FinFETs: The role of a single dopant in the channel

  1. Aldegunde, M.
  2. Martinez, A.
Proceedings:
Materials Research Society Symposium Proceedings

ISSN: 0272-9172

ISBN: 9781605115283

Year of publication: 2014

Volume: 1551

Pages: 35-40

Type: Conference paper

DOI: 10.1557/OPL.2013.895 GOOGLE SCHOLAR
Data source: Scopus