Aluminum thin film enhanced IR nanosecond laser-induced frontside etching of transparent materials

  1. Nieto, D.
  2. Cambronero, F.
  3. Flores-Arias, M.T.
  4. Farid, N.
  5. O'Connor, G.M.
Journal:
Optics and Lasers in Engineering

ISSN: 0143-8166

Year of publication: 2017

Volume: 88

Pages: 233-242

Type: Article

DOI: 10.1016/J.OPTLASENG.2016.08.018 GOOGLE SCHOLAR