Diffractive masks by confocal microscopy

  1. Maceira, P.
  2. Moreno, V.
  3. Salgueiro, J.R.
  4. Guitian, F.
  5. Gil, A.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 9780819485755

Year of publication: 2011

Volume: 8001

Type: Conference paper

DOI: 10.1117/12.892177 GOOGLE SCHOLAR
Data source: Scopus