Axial displacement and tilting control of a plane surface using a circular zone plate
- Moreno, V.
- Bara, S.
- Perez, M.V.
- Gomez-Reino, C.
ISSN: 1362-3044, 0950-0340
Year of publication: 1991
Volume: 38
Issue: 5
Pages: 925-933
Type: Article
ISSN: 1362-3044, 0950-0340
Year of publication: 1991
Volume: 38
Issue: 5
Pages: 925-933
Type: Article